Nikon VMZ-K3040 & VMZ-K6555 共轭焦影像测量系统
Simultaneous wide-area height measurements with confocal optics and 2D measurement with 15× brightfield zoom optics.
VMZ-K3040 | VMZ-K6555 | |
 |  | |
XY Stroke (mm) | 300×400 | 650×550 |
Magnification (Type S) | 1.5× / 3× / 7.5× | 1.5× / 3× / 7.5× |
Magnification (Type H) | 15× / 30× | 15× / 30× |
Z-axis Stroke (mm) | 150 | 150 |
Max. guaranteed loading capacity (kg) | 20 | 30 |
Max. permissible error U1X, U1Y (µm) | 1.5+2.5L / 1000 | 1.5+2.5L / 1000 |
Max. permissible error of Z axis (µm) | 1+L / 1000 | 1+L / 1000 |
Zoom Heads
Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of fine three-dimensional geometries. Confocal Optics are designed for wide FOV height measurement. |  |
Brightfield observation can sometimes be difficult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics. |  |
Top layers of both thin transparent film and metal surface can be easily detected using Confocal optics. |  |
